Microelectromechanical Systems I: Fundamentals of MEMS

This course explores the fundamental physical principles of Microelectromechanical Systems (MEMS) and their critical role in bridging the gap between the digital and physical worlds. Divided into five sections, it provides a foundational understanding of micro-scale physics, scaling laws, and the mechanical behavior of structures that enable modern sensing and actuation.

The first section introduces the core definitions and scale of MEMS, distinguishing these integrated systems from traditional