Microelectromechanical Systems II: Design Principles

This course transitions from fundamental physical principles to the systematic modeling and design of functional Microelectromechanical Systems (MEMS). Divided into five sections, it provides the analytical tools necessary to transform theoretical micro-physics into high-performance sensors and actuators used in global industry.

The first section introduces the methodology of Lumped-Element Modeling, teaching students how to simplify complex multiphysics systems into equivalent mass-spring-dampe