Microelectromechanical Systems III: Fabrication Fundamentals

This course explores the industrial reality of bringing Microelectromechanical Systems (MEMS) from a theoretical design to a commercial product. Divided into five sections, it provides a comprehensive overview of the materials, microfabrication strategies, and packaging constraints that define the global MEMS industry.

The first and second sections establish the MEMS Materials and Process Landscape. Students will compare traditional silicon-based fabrication with emerging polymers, ceramics, and